JPS62152086U - - Google Patents

Info

Publication number
JPS62152086U
JPS62152086U JP3952886U JP3952886U JPS62152086U JP S62152086 U JPS62152086 U JP S62152086U JP 3952886 U JP3952886 U JP 3952886U JP 3952886 U JP3952886 U JP 3952886U JP S62152086 U JPS62152086 U JP S62152086U
Authority
JP
Japan
Prior art keywords
ion
generation chamber
ion generation
source
hollow cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3952886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3952886U priority Critical patent/JPS62152086U/ja
Publication of JPS62152086U publication Critical patent/JPS62152086U/ja
Pending legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3952886U 1986-03-18 1986-03-18 Pending JPS62152086U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3952886U JPS62152086U (en]) 1986-03-18 1986-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3952886U JPS62152086U (en]) 1986-03-18 1986-03-18

Publications (1)

Publication Number Publication Date
JPS62152086U true JPS62152086U (en]) 1987-09-26

Family

ID=30852778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3952886U Pending JPS62152086U (en]) 1986-03-18 1986-03-18

Country Status (1)

Country Link
JP (1) JPS62152086U (en])

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